蚀刻剂/金属的匹配性表
| Al | Au | Cr | Cu | Ni | Si | Si3N4 | SiO2 | Ti | W | GaAs | Ta/TaN |
铝 A | etch | ok | etch | etch | etch | surf ox | slight | ok | ok | ok | etch | surf ox |
铝 D | etch | ok | slight | ok | ok | ok | slight | ok | ok | ok | ok | ok |
铬蚀刻剂 1020 | etch | ok | etch | etch | etch | surf ox | ok | ok | ok | ok | etch | surf ox |
铬蚀刻剂 1020 CRE-473 | etch | ok | etch | ok | slight | ok | ok | ok | etch | ok | etch | ok |
铬蚀刻剂 TFD | etch | ok | etch | etch | etch | surf ox | ok | ok | ok | ok | etch | surf ox |
铜蚀刻剂 100 | etch | ok | slight | etch | etch | ok | ok | ok | slight | ok | etch | ok |
铜蚀刻剂 200 | etch | ok | slight | etch | etch | ok | ok | ok | slight | ok | etch | ok |
铜蚀刻剂 APS-100 | ok | ok | ok | etch | slight | ok | ok | ok | ok | ok |
| ok |
GE-8110 | etch | etch | ok | corrode | ok | ok | ok | ok | ok | ok | etch | ok |
GE-8111 | etch | etch | ok | corrode | ok | ok | slight | ok | ok | ok | etch | ok |
GE-8148 | etch | etch | ok | corrode | ok | ok | ok | ok | ok | ok | etch | ok |
金蚀刻剂 TFA | etch | etch | ok | corrode | slight | ok | ok | ok | ok | ok | etch | ok |
镍铬蚀刻剂 TFC | etch | ok | etch | etch | etch | surf ox | ok | ok | ok | ok | etch | surf ox |
镍铬蚀刻剂 TFN | etch | ok | etch | etch | etch | surf ox | ok | ok | ok | ok | etch | surf ox |
镍蚀刻剂 TFB | etch | ok | etch | etch | etch | surf ox | ok | ok | ok | ok | etch | surf ox |
镍蚀刻剂 TFG | etch | ok | ok | ok | etch | ok | ok | ok | ok | ok | ok | ok |
镍蚀刻剂 1型 | etch | ok | slight | etch | etch | ok | ok | ok | slight | ok | etch | ok |
银蚀刻剂 TFS | etch | etch | ok | corrode | slight | ok | ok | ok | ok | ok | etch | ok |
氮化钽 蚀刻剂 Ⅲ | etch | ok | etch | etch | etch | etch | ok | etch | etch | ok | etch | etch |
氮化钽蚀刻剂 SIE-8607 | etch | ok | etch | etch | etch | etch | ok | etch | etch | ok | etch | etch |
钛蚀刻剂 TFT | etch | ok | etch | ok | ok | ok | etch | etch | etch | ok | etch | ok |
钛蚀刻剂 TFTN | etch | ok | etch | slight | slight | ok | ok | ok | etch | ok | etch | ok |
钛-钨 TiW-30 | ok | ok | ok | ok | slight | ok | ok | ok | ok | ok |
| ok |
钨蚀刻剂 TFW | etch | etch | etch | ok | etch | slight | ok | slight | ok | etch | etch | ok |
注: etch=显著蚀刻;slight=轻微浸蚀; ok=不浸蚀;surf ox=表面氧化; corrode=表面腐蚀