X-Y scan range X-Y方向扫描范围 | 90µm x 90µm typical, 85µm minimum 90µm × 90µm 典型值,最小85µm |
Z range Z方向扫描范围 | 10µm typical in imaging and force curve modes, 9.5µm minimum 在成像及力曲线模式下典型值为10μm;最小9.5μm |
Vertical noise floor 垂直方向噪音基底 | < 30pm RMS in appropriate environment typical imaging bandwidth (up to 625Hz) < 30pmRMS, 在合适的环境及典型的成像带宽(达到625Hz) |
X-Y position noise(closed-loop) X-Y定位噪音(闭环) | ≤0.15nm RMS typical imaging bandwidth (up to 625Hz) ≤0.15nm RMS,典型成像带宽(达到625Hz) |
X-Y position noise(open-loop) X-Y定位噪音(开环) | ≤0.10nm RMS typical imaging bandwidth (up to 625Hz) ≤0.10nm RMS,典型成像带宽(达到625Hz) |
Z sensor noise level(closed-loop) Z传感器噪音水平(闭环) | 35pm RMS typical imaging bandwidth (up to 625Hz); 50pm RMS, force curve bandwidth (0.1Hz to 5kHz) 35pm RMS,典型成像带宽(达到625Hz); 50pm RMS,力曲线成像带宽(0.1Hz to 5kHz) |
Integral nonlinearity(X-Y-Z) 整体线性误差(X-Y-Z) | < 0.5% typical < 0.5% 典型值 |
Sample size/holder 样品尺寸/夹具 | 210mm vacuum chuck for samples, ≤210mm diameter, ≤15mm thick 210mm 真空吸盘样品台;夹具,直径 ≤210mm, 厚度 ≤15mm |
Motorized position stage (X-Y axis)
电动定位样品台(X-Y轴)
| 180mm × 150mm inspectable area; 2µm repeatability, unidirectional; 3µm repeatability, bidirectional 180mm × 150mm可视区域; 单向2µm重复性; 双向3µm重复性 |
Microscope optics
显微镜光学系统
| 5-megapixel digital camera; 180µm to 1465µm viewing area; Digital zoom and motorized focus 五百万像素数字照相机; 180µm至1465µm可视范围; 数字缩放及自动对焦功能 |
Controller 控制器 | NanoScope V NanoScope V型控制器 |
Workstation
工作站 | Integrates all controllers and provides ergonomic design with immediate physical and visual access 整合所有控制器、结合人体工学设计,提供直接的物理或可视接口 |
Vibration isolation 振动隔绝 | Integrated, pneumatic 整体式气动减震台 |
Acoustic isolation 声音隔绝 | Operational in environments with up to 85dBC continuous acoustic noise 可隔绝环境中85 dBC的持续噪音 |
AFM modes AFM模式 | Standard: ScanAsyst, PeakForce Tapping, TappingMode (air), Contact Mode, Lateral Force Microscopy, PhaseImaging, Lift Mode, MFM, Force Spectroscopy, Force Volume, EFM, Surface Potential, Piezoresponse Microscopy, Force Spectroscopy; Optional: PeakForce QNM, HarmoniX, Nanoindentation, Nanomanipulation, Nanolithograpy, Force Modulation (air/fluid), TappingMode (fluid), Torsional Resonance Mode, Dark Lift, STM, SCM, C-AFM, SSRM, PeakForce TUNA,TUNA, TR-TUNA, VITA |
Certification 认证 | CE |